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P468 – Mirror Unit IPE LNLS
Application
Mirror unit (M1) for soft X-ray synchrotron radiation
Year of delivery
2019
Installation site
IPE beamline at Sirius Synchrotron Light Source, LNLS Brazil
Design Features
-
Constant-strut-length hexapod mechanism.
- Six degrees of freedom and selectable rotation center.
- Spectral range: 90 – 2000 eV.
- Optical elements: one collimating mirror.
-
Active side cooling of the mirror.
- Electrode at mirror surface for carbon contamination prevention.
- Temperature sensor at mirror chin guard.
-
EtherCAT based motion control system, synchronized encoder readout (suitable for on-the-fly measurements), software with server-client architecture, TCP-IP protocol, EPICS interface.
- Adjustable support structure.
- Permanently installed bakeout provisions.
Performance Features
- High positioning resolution (minimum incremental motion).
- High stability and repeatability for all degrees of freedom.
- Minimized mounting induced deformations.
Outer Dimensions
Technical specifications and performance values
General
Vacuum chamber
Chamber type
cylindrical, vertical axis
Main flanges
at the top, flat polished, COF
Material
1.4404 (C < 0.02%)
Base pressure
10-10 mbar range
Optical design parameters
Beam height
1400 mm
Number of mirrors
1
Substrate shape
cylinder
Mirror dimensions
360 mm x 40 mm x 50 mm
Actuator drives for hexapod axes
Resolution (design value)
0.004 µm /motor fine step
(1/128, recommended)
0.005 µm /encoder count
Mirror mechanics
Pitch rotation
Range
± 10 mrad
Resolution (measured value)
0.20 µrad
Repeatability
0.10 µrad (pitch)
0.06 µrad (roll)
Repeatability
(1.2 l /min water flow rate)
0.10 µrad (pitch)
0.06 µrad (roll)
Stability (300 s)
< 0.03 µrad
Long-term stability
(1.5 h at 1.2 l /min water flow rate)
< 0.04 µrad
Roll rotation
Range
± 10 mrad
Resolution
< 0.20 µrad
Repeatability
0.12 µrad (pitch)
0.06 µrad (roll)
Yaw rotation
Range
± 10 mrad
Resolution
< 0.20 µrad
Repeatability
0.12 µrad (pitch)
0.06 µrad (roll)
Lateral translation
Range
± 5 mm
Resolution
< 0.10 µm
Repeatability
0.009 µm
Positioning stability
< 0.01 µm
Longitudinal translation
Range
± 5 mm
Resolution (calculated value)
< 0.10 µm
Vertical translation
Range
± 5 mm
Resolution
< 0.10 µm